Edwards Vacuum D05002202 WRA200S Residual Gas Analyzer

WRA - Residual Gas Analyzer

The Edwards RGAs are quadrupole mass spectrometers with a high performance analyser tube consisting of the ion source, the quadrupole filter and the detector.

WRA - Wide Range Residual Gas Analyser, for advanced and more demanding processes and analysis allowing higher analyzer temperatures and bake out temperatures of up to 300°C. To match advanced needs, the WRA offers a better sensitivity to detect even the smallest traces of molecules.

Features:

• WRA - 1-200 or 1-300 amu, for more demanding processes and analysis
• Total pressure measurement for full process control
• Dual filament for highest reliability and up-time
• Ethernet protocol
• Degas function
• Protection of ion source and EM
• Customer replaceable parts